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器簡介：

The microCMA is a compact (2.75" CF mount) cylindrical mirror type Auger (AES， Auger Electron Spectroscopy) analyzer.

The microCMA is the most innovative Auger analyzer to hit the market in 30 years.

獨有的優異性能：

2.75" flange mount CMA with a built in 3kV co-axial electron gun. The combination of these two features is what makes the microCMA stand out from the competition.

The fact that the microCMA fits on a 2.75" flange means that it can be added to most chambers without needing to add another port to the chamber (most chambers have extra 2.75"ports available).

Being small also means that it is possible to make a complete system using just a T and a small ion pump， rather than a conventional large chamber.

The co-axial electron gun makes it easy to align the sample (elastic peak) and also eliminates the need for an off axis electron gun (electron source， power supply and flange).

技術參數：

Compact 2.75" CF flange mounted

Coaxial 3kV electron gun

CeBix filament (runs cooler than Lab6)

USB control

ASCII commands

Proven CMA design

應用領域：

?Surface Analysis

?Auger / AES

?Thin Film Analysis

?Metallurgy

?Semiconductor

?In-Situ

?MBE

UHV

主要特點：

小巧緊湊– fits on 2.75" flange (needs 1.5" ID tube)

Benefits of CMA design include – easy to align sample， good signal and resolution.

3kV 共軸電子槍

CeBix 燈絲，提供大電流密度

USB接口

Windows 7 數據獲取及分析軟件

ASCII command structure

LabVIEW 軟件驅動