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產品型號：

 Ailesic-1500

產品介紹（Ailesic-1500）：

• 
  

• 1. Adapt to 1500℃Extra High Temp Processes
  -Rapid Heating: ～20℃/min (10℃/minover 1350℃)
  -Mass production Capability: ～50 wafers/batch

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• 2. Attain and Maintain Extra Low Metal Cont.
  -Extra High Purity All-CVD SiC Wares
  -Effective In-situ Cleaning System

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• 3. Extra Low Running Cost
  -Long life SiC wares
  -Long life Heater