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PHYS TECH GmbH RH2035 霍爾效應測試儀器
1. | 設備名稱: | 霍爾效應測試儀 |
2. | 功能描述: | 測量半導體薄膜中載流子類型、載流子濃度、遷移率、電阻率、霍爾系數等參數 |
3. | 技術參數: | |
3-1 | 測試范圍: | Si, SiGe, SiC, GaAs, InGaAs, InP, GaN (N Type & P Type)等材質的半導體薄膜中載流子類型、載流子濃度、遷移率、電阻率、霍爾系數等參數 |
3-2 | 磁場: | |
3-2-1 | 磁場強度: | 0.45T 永磁體 |
3-2-2 | 磁場類型: | 永磁體 |
3-2-3 | 磁場均勻性: | 磁場不均勻性<±1 % 10年內磁場變化<±0.2% |
3-3 | 溫 度: | |
3-3-1 | 溫度區域: | 77K(液氮溫度)或室溫 |
3-4 | 電阻率范圍: | 1 µ Ohm*cm ~10 M Ohm*cm |
3-5 | 電阻范圍: | 0.1 m Ohms ~10 G Ohms |
3-6 | 載流子濃度: | 107~1021cm-3 |
3-7 | 遷移率: | 10-2~107 cm2/volt*sec |
3-8 | 輸入電流: | |
3-8-1 | 電流范圍: | 1000 pA~10mA |
3-8-2 | 電流解析度: | 2.5 pA (lowest range) |
3-8-3 | 電流精度: | 2% |
3-9 | 輸入電壓: | |
3-9-1 | 電壓范圍: | ±10V |
3-9-2 | 電壓分辨率: | 1μV |
4. | 儀器特點: | |
4-1 | Automatic contact check 自動接觸檢查(歐姆接觸) | |
4-2 | Routine and enhanced software 常規和增強軟件 | |
4-3 | Differential resistivity measurements by I/V-curves I/V曲線測試電阻率差異 | |
4-4 | Misalignment voltage compensation 失調電壓補償 | |
4-5 | Correction of slow sample drift voltage, especially for ZnO, 修正慢樣品漂移電壓,特別是氧化鋅 | |
4-6 | Automatic field calibration 自動現場標定 | |
4-7 | Large concentration and resistivity range 大濃度和電阻率范圍 | |
4-8 | Flexible, modular hardware 靈活的模塊化硬件 | |
4-9 | Support of various magnets, for example BioRad HL 5200 支持多樣磁場 | |
4-10 | Support of various temperature controllers 支持各種溫度控制器(支持客戶自行升級變溫系統) | |
5 | 硬件 | |
5-1 | The standard system consists of a bench top electronic system, a small magnet and a sample stage for room temperature and LN2 measurements. 標準系統包含電子測試系統、磁場和兩個溫度區域的測試平臺(室溫和液氮溫度) | |
5-2 | The electronics include the current source, the voltage measurement part, the contact switching module and the IEEE or RS232 interface. It is completely micro processor controlled. 電子測試系統包括由單片機控制的電流源、電壓測試、接觸開關模塊、IEEE或RS232接口 | |
5-3 | The contact switching module is designed to allow all possible measurement configurations. 接觸開關模塊支持所有用戶用于其他的配置(用戶可以采用制冷機做變溫霍爾測試) | |
5-4 | The current source has adjustable limits for voltage and/or power. {+++} 電流源具有可調電壓和/或電源的限制 | |
5-5 | Voltage measurement provides different input amplifiers optimized for either low current or low voltage applications. 電壓測量提供了不同的輸入放大器或低電流或低電壓應用的優化。 |
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