粉體行業在線展覽
粉體行業在線展覽
石墨烯卷對卷設備
直接聯系
山東力冠微電子裝備有限公司
山東
面議
山東力冠
石墨烯卷對卷設備
307
產品特點/Product Characteristics：
? 石墨烯薄膜產業化設備
Graphene film industrialization equipment
? 寬幅卷對卷連續生長
Wide roll-to-roll continuous growth
? APC系統:真空蝶閥自動控制
APC System: Automatic Control of Vacuum Butterfly Valve
? 碳源等工藝氣體MFC控制
MFC control of process gas such as carbon source
? 薄膜制備過程全自動控制
Automatic control of film preparation process
? 三腔室結構
Three-chamber structure
技術指標/Technical Indicators：
? 工作溫度:800-1050°C
Operating temperature: 800-1050°c
? 工藝管材質:石英管
Material of process tube: quartz tube
? 銅箔寬度:500mm
lnner diameter of process pipe: medium 550mm
? 極限真空度:小于3Pa，可恒壓控制
Limit vacuum degree: less than 3Pa, which can be controlled by constant pressure
? 恒溫區:1000mm、五段控溫
Constant temperature zone: 1000mm, five-stage temperature control
? 工藝管內徑:550mm
lnner diameter of process pipe: medium 550mm
? 銅箔運行速度約:100-400mm/min，可調
The running speed of copper foil is about 100-400mm/min, which can be adjusted
